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          霍爾傳感器未來的發展方向

            三是測量電流強度。 
          將霍爾器件的輸出(必要時可進行放大)送到經校準的顯示器上,即可由輸出電壓的數值直接得出被測電流值。這種方式的優點是結構簡單,測量結果的精度和線性度都較高,可測直流、交流和各種波形的電流。但它的測量范圍、帶寬等受到一定的限制。當然,也可采取一些改進措施,例如選擇飽和磁感應強度高的磁芯材料,制成多層磁芯,采用多個霍爾元件來進行檢測等等。這類霍爾電流傳感器的價格相對較低,使用非常方便,已得到廣泛的應用,國內外已有許多廠家在生產。 
            四是測量微小位移。 
            如果霍爾元件的工作電流保持不變,而使其在一個均勻梯度磁場中移動,它輸出的霍爾電壓值只由它在該磁場中的位移量來決定。用霍爾元件測量位移的優點很多,如慣性小、頻響快、質量可靠、壽命長。以微位移檢測為基礎,可以構成壓力、應力、應變、機械振動、加速度、重量等霍爾傳感器。 
            隨著電子技術的進一步發展,業界對霍爾器件提出了一些新的要求: 
            新的器件結構 
            常規霍爾元件要求磁場垂直于霍爾元件,且在整個霍爾元件上是均勻磁場。而在其他情況下,需要根據磁場分布情況,設計各種各樣相應的非平面霍爾結構。其中,垂直式霍爾器件是新開發出來的,具有低噪聲、低失調和高穩定性的特點。 
            新的應用環境要求霍爾器件更加小型化、更高的靈敏度且集成度更高。為了適用于空間較小的檢測環境,例如電動機中的間隙、磁力軸承以及其他像永磁體掃描等需接近測量表面的場合,需要更加小型化的器件。 
            另外,為了檢測更小的變化量,需要靈敏度更高的器件。器件的小型化不僅適應了新的應用環境,也降低了器件成本。 
            國外霍爾傳感器的發展方向就是采用CMOS(互補金屬氧化物半導體)技術的高度集成化,同樣功能可以集成在非常小的芯片內,如信號預處理的最主要部分已在霍爾器件上完成。其中包括前置放大、失調補償、溫度補償、電壓恒定等,并且可以在芯片上集成許多附加功能,如數據存儲單元、定時器A/D轉換器、總線接口等。所有這些都采用CMOS標準,它們開辟了霍爾器件新的應用領域。 
            由于采用了微電子工藝,硅霍爾傳感器能很好地適用于許多工業應用,這極大地推動了霍爾器件的發展。目前,國外霍爾傳感器的研發進展迅速,不僅解決了與EMC(電磁兼容性)器件的協同工作問題,而且感應精度也得到了提高。但是,霍爾傳感器的可靠性將是下一步必須著重考慮的問題。 

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